Chuck Table Wafer Cutting Disc
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Information
Chuck Table Wafer Cutting Disc
• Commonly used for wafer cutting and cleaning
• Porous ceramic resistance value: 106~108 ohms
• Surface grinding accuracy reaches to <5µm
• 6", 8", 12" inch wafer dicing tray with stainless steel base.
• High uniformity and high adsorption
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Q&A