High precision porous ceramics, vacuum chucks and air flotation elements with micron to submicron po
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High precision porous ceramics, vacuum chucks and air flotation elements with micron to submicron pores.
Capability:
• The pore size from 0.2µm to 100µm for various special purposes
• Currently the main products are with pore size 2µm-5µm, 15µm-20µm, 30µm-40µm.
• The flatness can reach 0.03-0.5mm according to surface size.
• The size of a single piece can reach 520*520mm, and the combined size can reach more than 2000*2000mm.
• The porosity can be controlled by processing technique (10-60%), usually 35-40%
• Customizable in various shapes and sizes
• Base material: precision ceramics, granite, stainless steel, aluminum alloy
• Colors: white, black, coffee black, dark black, khaki, etc.
• The porous ceramic vacuum module can be designed with heating and temperature control, the maximum surface temperature is 150 ℃.
• Porous ceramics with low resistance value and high antistatic (resistance value 105~109 ohms)
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