Hollow precision XY motion positioning stage
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Information
Hollow precision XY motion positioning stage
Introduction:
1. Linear motor drive
2. Optical ruler feedback
3. Accuracy: ±3μm
4. Straightness: ±2μm
5. The hollow stage is suitable for AOI measurement.
6. Use laser interferometer to calibrate and does accuracy correction.
Application:
Testing platform, mechanical arm calibration, AOI measurement.
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Q&A
