Air-floating linear motor stage
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Information
Air-floating linear motor stage
Introduction:
With XY positioning, its structure is H-type. Its XY axis movement is on the same plane, which can reduce the height of the platform and reduce Abbe error. The guide rail is composed of air-floating bearings made of porous ceramic. The air-floating guide rail has better stability. The driving device and feedback device use linear motors and optical scales. The movement structure of this stage has low friction, with the advantages of rapid movement, high accuracy, and short setting time. Application: Exposure machine stage, image measurement stage
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