high-precision nanopositioning stage
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high-precision nanopositioning stage
Introduction
Introduction: The motion mechanism of the high-precision nanopositioning stage mainly integrates an air-floating linear motor stage and a PZT stage. The feedback system uses a multi-degree-of-freedom laser interferometer measurement system, which uses a PZT stage to correct the geometric errors occur during the linear motor positioning stage moves.
The multi-degree-of-freedom dual-frequency laser interferometer positioning feedback measurement system has high resolution and rapid response, so the positioning stage moves fast and the positioning accuracy is high. -
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