Porous Ceramic Vacuum Module
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Porous Ceramic Vacuum Module
Porous ceramic vacuum module with granite platform – using granite as the base with designed flow channels, and paved with micro-porous ceramic plates (so far each piece of maximum 570mm*520 mm) . We can manufacture the module with the size over 4m.
Porous ceramics plates have very tiny pores(2µm-30µm, customers can choose the pore size which meets their application ), and the flatness of the ceramic plate can also be processed to less than 5μm (up to the size of the plates. When the part with very high precision is attached to the vacuum chuck, its surface will not be scratched or damaged.
Feature:
Partial chucking, corrosion resistance, wear resistance, light weight, insulation, no dust, high temperature resistance.
Application:
Semiconductor wafer cutting, panel inspection, circuit board processing.
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